Throughput
50 wafers/h with 16 profile measurement points, notch measurement and diameter measurement
MTBF: 1000 h
MTTR: 1 h
AccuracyAccuracyStandard deviation
Radii± 1 μm1 μm
Half angles± 0.2°0.05°
Blunt lengths± 2 µm1 µm
Facet lengths± 2 µm1 µm
Profile deformation> 5 μm
Facilities
Control interfaceEthernet
Input voltage88 to 264 VAC, 47 to 63 Hz
CDA0.6 MPa (87 psi)
Vacuum68 kPa (9.8 psi)
Operating temperature20 to 24°C
Order code
Order code exampleWATOM LS234 
(for diameter 300/450 mm
with class 2 laser system)
Sensor typesLS2 (laser class 2)
LS3 (laser class 3)
CCD
Diameters12 (150/200 mm)
23 (200/300 mm)
34 (300/450 mm)