Throughput
50 wafers/h with 16 profile measurement points, notch/flat and diameter measurement 
MTBF: 1000 h
MTTR: < 4 h
AccuracyAccuracyStandard deviation
Radii± 2 µm1µm
Half angles± 0.3°0.1°
Blunt lengths± 3 µm2 µm
Facet lengths± 3 µm2 µm
Profile deformation> 8 µm
Facilities
Control interfaceEthernet
Input voltage88 to 264 VAC, 47 to 63 Hz
CDA0.6 MPa (87 psi)
Operating temperature20 to 24 °C
Order Code
Order code exampleWATOM T 12
(for diameter 150/200 mm)
Diameters12 (150/200 mm)   
23 (200/300 mm)   
Options   
FFU
Console   
Light tower
GEM-SECS-II Interface