Profile measurement

The patented measurement method which uses a lightsectioning sensor can measure the profile at any point on the wafer edge, even within the notch. As well as providing a throughput of more than 50 wafers per hour with 16 measurement points, WATOM stands out from the crowd for its ability to deliver profile evaluation to KoCoS-specific criteria, SEMI M73 standard or customer-specific criteria. 

Notch Measurement

WATOM reliably determines the full range of typical notch measurement parameters with maximum precision, including angles, radii and notch depth.

Diameter measurement

The geometrical parameters measured by WATOM include highly precise measurements of wafer diameter exact to the μm.