WATOM systems rely on the WATOM software for operation, control and evaluation. This modular software, which has been specially developed by KoCoS for the specific purpose of geometrical measurement, is well structured and easy to use.
WATOM fulfills all the requirements of modern semiconductor manufacturing equipment, whether used in operator mode, expert mode or fully automatic mode.
Very little input is required from the operator to start the measurement process. A pass/fail assessment is made on the basis of a comparison of the actual results with the target results pre-defined for each customer.
Using the expert mode, trained personnel can create measurement recipes, carry out statistical analyses and run detailed measurements of individual points.
Thanks to the GEM-SECS-II interface, WATOM can be integrated quickly and easily in the host environment of modern semiconductor fabs.