Inspection of silicon carbide boules (SiC)

LOTOS

3D measurement and inspection

  • Checking dimensions
  • Measure notch, flat
  • Crystal inspection
  • Chip checking

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Fully automatic inspection of silicon carbide boules

Achieving the stringent zero defect strategy in the industry is becoming a major challenge for silicon carbide substrate manufacturing. Both the switch from 150 to 200 mm wafers and the general shift in their focus away from pure silicon are making the processes struggling to achieve sufficient yields and reliability.

LOTOS 3D measurement systems help implementing the zero-defect strategy toward high-yield production processes without any scrap. Shortly after crystal growing, silicon carbide boules can be inspected for chipping, geometric sizes and false polytypes or doping, eliminating scrap in subsequent production processes.

LOTOS checks all common parameters such as:

  1. Chip sizes, positions and remaining area for usage
  2. Outer diameter
  3. Diameter at the primary and secondary flat
  4. Flat lengths
  5. Notch contours
  6. Angular positions of notch and flat
  7. Boule thickness at any position


Furthermore, the boules can be inspected for inclusions of false polytypes.

Get your free demo and free feasibility studies for your measuring task!

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Whatever your request, we are here for you! Just enter contact details and the subject of your request and we will be happy to get back to you personally.
Or e-mail to: info(at)kocos.com
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Whatever your request, we‘re here for you.
Whatever your request, we are here for you! Just enter contact details and the subject of your request and we will be happy to get back to you personally.
Or e-mail to: info(at)kocos.com
Contact   

Let‘s stay in touch!
Subscribe to the KoCoS newsletter and be the first to know about our products, updates and other news.
Subscribe