Throughput | |||
50 wafers/h with 16 profile measurement points, notch measurement and diameter measurement MTBF: 1000 h MTTR: 1 h | |||
Accuracy | Accuracy | Standard deviation | |
Radii | ± 1 μm | 1 μm | |
Half angles | ± 0.2° | 0.05° | |
Blunt lengths | ± 2 µm | 1 µm | |
Facet lengths | ± 2 µm | 1 µm | |
Profile deformation | > 5 μm | ||
Facilities | |||
Control interface | Ethernet | ||
Input voltage | 88 to 264 VAC, 47 to 63 Hz | ||
CDA | 0.6 MPa (87 psi) | ||
Vacuum | 68 kPa (9.8 psi) | ||
Operating temperature | 20 to 24°C | ||
Order code | |||
Order code example | WATOM LS234 (for diameter 300/450 mm with class 2 laser system) | ||
Sensor types | LS2 (laser class 2) | ||
LS3 (laser class 3) | |||
CCD | |||
Diameters | 12 (150/200 mm) | ||
23 (200/300 mm) | |||
34 (300/450 mm) |