| Throughput | |||
| 50 wafers/h with 16 profile measurement points, notch measurement and diameter measurement MTBF: 1000 h MTTR: 1 h | |||
| Accuracy | Accuracy | Standard deviation | |
| Radii | ± 1 μm | 1 μm | |
| Half angles | ± 0.2° | 0.05° | |
| Blunt lengths | ± 2 µm | 1 µm | |
| Facet lengths | ± 2 µm | 1 µm | |
| Profile deformation | > 5 μm | ||
| Facilities | |||
| Control interface | Ethernet | ||
| Input voltage | 88 to 264 VAC, 47 to 63 Hz | ||
| CDA | 0.6 MPa (87 psi) | ||
| Vacuum | 68 kPa (9.8 psi) | ||
| Operating temperature | 20 to 24°C | ||
| Order code | |||
| Order code example | WATOM LS234 (for diameter 300/450 mm with class 2 laser system) | ||
| Sensor types | LS2 (laser class 2) | ||
| LS3 (laser class 3) | |||
| CCD | |||
| Diameters | 12 (150/200 mm) | ||
| 23 (200/300 mm) | |||
| 34 (300/450 mm) | |||
