| Throughput | ||
| 50 wafers/h with 16 profile measurement points, notch/flat and diameter measurement MTBF: 1000 h MTTR: < 4 h | ||
| Accuracy | Accuracy | Standard deviation |
| Radii | ± 2 µm | 1µm |
| Half angles | ± 0.3° | 0.1° |
| Blunt lengths | ± 3 µm | 2 µm |
| Facet lengths | ± 3 µm | 2 µm |
| Profile deformation | > 8 µm | |
| Facilities | ||
| Control interface | Ethernet | |
| Input voltage | 88 to 264 VAC, 47 to 63 Hz | |
| CDA | 0.6 MPa (87 psi) | |
| Operating temperature | 20 to 24 °C | |
| Order Code | ||
| Order code example | WATOM T 12 (for diameter 150/200 mm) | |
| Diameters | 12 (150/200 mm) | |
| 23 (200/300 mm) | ||
| Options | ||
| FFU | ||
| Console | ||
| Light tower | ||
| GEM-SECS-II Interface | ||
