PRODUCTS & SOLUTIONS
Technical data
Throughput:
50 wafers/h with 16 profile measurement points, notch measurement and diameter measurement | |
MTBF: | 1000 h |
MTTR: | 1 h |
Accuracy:
Standard deviation | accuracy | |
Radii | ±1 μm | 1 μm |
Half angles | ±0.2° | 0.05° |
Blunt lengths | ±2 μm | 1 μm |
Facet lengths | ±2 μm | 1 μm |
Profile deformation | >5 μm |
Facilities:
Control interface: | Ethernet | |
Input voltage: | 88 to 264 VAC, 47 to 63 Hz | |
CDA: | 0.6 MPa (87 psi) | |
Vacuum: | 68 kPa (9.8 psi) | |
Operating Temperature: | 20 to 24°C |
Order code:
WATOM dia type | ||
dia diameter | 100, 150, 200, 300, 450 | |
type sensor type | LS, CCD |