System Versions

WATOM LS

The patented measurement method of WATOM LS utilizes a light-sectioning sensor to measure the profile of the wafer edge with pinpoint precision,including the profile within the notch. Using a CCD camera, pictures are taken of the laser line produced by the edge profile. A mathematical algorithm developed by KoCoS is then used to determine the edge profile characteristics.

WATOM CCD

WATOM CCD uses CCD camera measurement as an alternative to high-precision light-sectioning and provides the ideal solution for less demanding profile measurement requirements, in particular when notch measurement is not required. A telecentric lens captures the profile image of the wafer edge illuminated by a telecentric light source.